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| It is the equipment to control and monitor evaporation source’s temperature and deposition speed at the same time. |
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8.4″ TFT-Color LCD, |
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Provide intuitive and convenient GUI |
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Equipped with built-in auto-tuning function that can be conveniently operated by using touch function |
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By basically having built-in Ethernet communication function, able to interconnect with PLC and PC |
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| Able to be applied for various fields |
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PID control on evaporation source’s temperature and deposition speed for OLED and CIGS solar cell |
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Control MBE, E-Beam system’s thin film’s thickness |
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| Operating System |
Microsoft Embedded XP |
| Dimension (W×D×H) |
432 × 430 × 190 |
| Power |
AC 220V 50/60Hz |
| TC/IP Port |
1 Port |
| Number Of Sensor |
4 |
| Sensor Frequency Range |
5.0 ~ 6.0 MHz |
| Thermocouple Input |
4 |
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| ITEM |
YAS, (XTR 3000B) |
| Temp. Control |
Yes |
| Rate Resolution |
0.0005 Å/s |
| Auto Tuning |
Yes |
| # of Max. Channel |
4 |
| Rate Control |
Yes |
| Control Method |
PID |
| Analog Out |
Standard (0-10V) |
| Communication |
LAN(TCP/IP) |
| Display |
8.4” Color LCD |
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| XTR-3000 exerts excellent performance in controlling Dopant and also, it can usefully control rate through auto tuning. Also, although temperature is the same, in amoled application that rate is changed according to the amount of material. Co-deposition should be performed. |
