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CIGS solar cell
Source Capacity : 1000cc
Substrate : 600x600 mm, 600x1200 mm
Deposition Rate : 100 nm/min
Uniformity : ± 7%
Homogeneity : ±10%
Substrate Temp. : 600 OC
Temp Uniformity : ±15%
Tact Time : 2 Min
Yas
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OLED Mass Production System
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System Design Optimazation
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OLED displays
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CIGS solar cell
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OLED linear system
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