Deposition rate in OLED mass production facilities has interrelation with productivity, material using efficiency, etc. like fig.3.
The faster deposition speed is, the higher productivity is. But duty on time and duty off time are decreased, which lowers the whole material using efficiency.
Therefore, system should be properly designed according to product’s application field..
According to multi-layered OLED’s characteristics, functional thin film should be deposited in many chambers and when transferring time between chambers is short, expensive organic material loss can be prevented. As shown in fig. 4, the shorter Off Time is, material can be saved. Therefore, in order to reduce Duty Off Tim influencing largely on productivity, transferring time between chambers should be minimized.
As for our company, by applying gluon chuck, rail, and shuttle technology, we possess the technology to stably transfer substrate in the quickest time..
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