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It is the equipment to effectively perform process parameter management by cleaning sources of LNS, CNS, and Point type. |
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It is used to fully exhaust remaining organic, inorganic, and metal materials in furnace of vaporizing source after performing vacuum deposition process during OLED mass production process |
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It is used to burn out and gas out remaining materials after wet-cleaning furnace used during OLED mass production process |
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Cell baking system is the product manufactured under strict particle management, which can be used in clean room together with mass production equipment. |
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