It is the equipment to effectively perform process parameter management by cleaning sources of LNS, CNS, and Point type.
It is used to fully exhaust remaining organic, inorganic, and metal materials in furnace of vaporizing source after performing vacuum deposition process during OLED mass production process
It is used to burn out and gas out remaining materials after wet-cleaning furnace used during OLED mass production process
Cell baking system is the product manufactured under strict particle management, which can be used in clean room together with mass production equipment.
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