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It is deposition source to be developed to high efficiency and high quality from the 4th generation and less in standby condition from circular optimized Inset, which is proper product as evaporation equipment for producing panel for mobile. |
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Form even thickness thin film without substrate’s rotation (thin film evenness is below 3%) |
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Material using efficiency is improved by 3~4 times compared to existing evaporation source |
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It can improve doping evenness and also, improve mask shadow phenomenon |
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It can be effectively applied from the 2nd generation (370×470mm) up to the 4th generation(730×920mm) |
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It is used for forming organic and inorganic thin film for OLED as well as thin film for CIGS |
