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By scanning substrate or evaporation source by using linear long nozzle, it can make high efficiency and high quality thin film, which is the evaporation source for substrate of the 4th generation and higher. This evaporation source is suitable for manufacturing OLED Panel for TV and notebook and product for OLED lighting
Materials using efficiency: ~ 50% (changed according to TS)
By applying YAS’s unique and special linear nozzle, it can make thin film within 5% thin film evenness.
It can improve doping evenness and also, it has small mask shadow phenomenon |
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2nd - 3.5th Gen. LNS
370 × 470 / 730 × 460 |
4th Gen. LNS
730 × 920 |
Dimension
(length x height x width) |
Heater |
615 × 91 × 41 |
992 × 104 × 48 |
| Water jacket |
730 × 130 × 350 |
1180 × 334 × 270 |
| Capacity |
500 cc |
1000 cc |
| Power |
20VDC 10A |
30VDC 20A |
| Deposition Rate |
Customized from 0.01Å/s |
| Uniformity |
< ± 3 % |
| Maximum operating Temp. |
600 ℃ |
| Thermocouple |
Double wire K - type |
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