CNS has unique Inset structure, which can have flux focused on the center. Therefore it is positioned at the center of substrate but because it can’t gather flux to wanted direction according to customer’s quality request and it is positioned on substrate’s side, CNS’s material using efficiency is 3!5 times better than point source.
Existing point evaporation source system can’t form compact system configuration because of problems on substrate rotation, distance between sources, and distance between substrate and source and also, particle generation according to substrate rotation is worried. But because CNS system is positioned at the center of substrate and progresses process under the standby condition, this system has largely excellent efficiency and quality..
By Shadow Effect and Doping Homogeneity improvement effect, excellent quality film can be made
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