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Adopt YAS’ unique nozzle, heating structure, and cooling method |
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Ensure high material using efficiency, thin film evenness, and high doping evenness |
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Without materials condensation phenomenon, ensure thin film quality stability by low heat conduction phenomenon |
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Easy repair and maintenance
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| The 2nd generation LNS : Product applied for mass production system |
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| LNS of the 4th generation and higher : Developed 4G product and 5G Simulation |
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TS 250 |
TS 150 |
TS 100 |
| 4th Gen, 730×920
730 Scan |
Simulation |
52 % |
58 % |
75 % |
| Experiment Result |
42 % |
50 % |
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| 5th Gen, 1100×1300
1100 Scan |
Simulation |
64 % |
73 % |
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| Estimation |
~ 52 % |
~ 65 % |
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| Linear evaporation source’s thin film evenness for the 4th generation: < 4 % |
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